The paper deal with an open loop analogue capacitive micro-accelerometer both from the point of view of mathematical modeling and through the achievement of certain numerical simulations which must ...

Misalignment of three magnetometer's axes from three accelerometer's axes respectively. After calibration, both sensors' readings should fit on the surface of spheres with their centres at the origin, ...

Abstract: Modeling and simulation of MEMS devices is important part of whole process of their creation and fabrication. Knowledge of mechanical, electrical and thermal phenomena and their mathematical ...