Abstract: Recent emergence of 3D printing technology has made the fabrication of unconventional micron scale structures possible. The shadow mask is a typical high aspect ratio 3D structure used to ...

As extreme ultraviolet (EUV) lithography moves closer to production, the industry is paying more attention to a problematic phenomenon called mask 3D effects. Mask 3D effects involve the photomask for ...

Abstract: Mask 3D effect has been studied in the past and the main characteristic of it is that it will cause positive focus shift to the semi-dense patterns at pitches of 200 and 300 nm for as much ...

Researchers at MIT and Harvard have incorporated living microbes into 3D-printed objects to make them more dynamic. The underlying resin material is embedded with chemical “instructions” that tell a ...

Onetime Microsoft executive Jonathan Roberts knows that not all 3D-printed personal protective equipment being produced for the nation’s coronavirus response is created equal. “It sends a signal to ...