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Abstract: Recent emergence of 3D printing technology has made the fabrication of unconventional micron scale structures possible. The shadow mask is a typical high aspect ratio 3D structure used to ...

Part of Pandemic-Proof, Future Perfect’s series on the upgrades we can make to prepare for the next pandemic. Some of the most indelible images of the early pandemic were of the personal protective ...

Voronoi patterns are a popular design choice for 3D printing enthusiasts. These patterns are created by dividing a space into cells, with each cell being assigned to its nearest point. The result is a ...

As extreme ultraviolet (EUV) lithography moves closer to production, the industry is paying more attention to a problematic phenomenon called mask 3D effects. Mask 3D effects involve the photomask for ...

Abstract: In 45nm node and beyond with hyper NA lithography, mask topography effect is not ignorable and mask CD bias impacts printing performance such as MEEF or exposure latitude. In that situation, ...

One of the main challenges in developing semiconductor chip technology is making electronic components smaller and more effective. This difficulty is most noticeable in lithography, which is the ...